Ion Implantation Parts

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Ion implantation is an important process in the manufacture of semiconductors. The most important part of an implant system is the beam path. Here, the ions are generated, concentrated, accelerated, and targeted towards the wafer. Our ion implantation parts are made from molybdenum and tungsten due to these materials ideal combination of corrosion resistance, strength, and high thermal conductivity.

Molybdenum Parts

Molybdenum & Tungsten Parts Properties
-High Melting point
-Outstanding creep resistance
-Excellent corrosion resistance
-Good electrical and thermal conductivity
-Outstanding purity

Our products for the semiconductor industry:
-Chambers (tungsten, molybdenum and alloys)
-Filaments (tungsten and tungsten alloys)
-Arc slits (tungsten, molybdenum and alloys)
-Holders (tungsten, molybdenum and alloys)
-Cathodes (tungsten, molybdenum and alloys)
-Spare parts (tungsten, molybdenum and alloys, ceramics, steel)

Contact us at sales@edge-techind.com for inquiries on ion implantation components made by tungsten and molybdenum.

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